Skip to content
Made in the USA | 1-888-SEMIGROUP  |  parts@semigroup.com | Contact Us

853-012175-004 | LAM Research Harmonic Arm Drive – Quick Exchange Option and Repair

LAM Harmonic Arm Drive

LAM Harmonic Arm Drive.   IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST“ button and fill out the form to get started.

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)

Request Service Now

Hidden
Name(Required)
Down a tool? Request Expedited Service.
This field is for validation purposes and should be left unchanged.

SKU 853-012175-004-REP Category

Description

OEM Part Number 853-012175-004

LAM Research Harmonic Arm Drive

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)

Additional information

Condition

Buy Outright, Quick Exchange

Similar Products

Other Related Products