Radio Frequency (RF) Generators ARCHIVED

What are Radio Frequency (RF) Generators?

The science of radio frequencies (RF) is a vast and complex subject. Your RF generators and RF matches have a lot of engineering and design behind them, and serve very specific and very important functions.  Here will explain the basic concepts you need to know to operate your equipment safely and efficiently.

RF Generator vs. RF Match

RF generators & RF matches go hand-in-hand like the pedal and gears of a bike.  In semiconductor manufacturing, RF Generators are used to power silicone wafer etching. An RF Match matches the impedance of the etch chamber to your RF generator. It’s critically important to match the frequencies coming from the RF generator to the etch chamber by varying the inductance and capacitance. If these are not properly matched, you could face serious problems with your etching process.

Just like when riding a bicycle with gears, the gears must fully shift into place in order for the bike rider to properly power the bike.  If the gears are out of alignment, you will hear that awful grinding sound.  Similarly, if the frequency of your RF Match and RF Generator are not synced during the etching process, your wafers or your RF Generator can be damaged.

Types of Problems That Can Occur

Problem #1 – Reflective Power

When an RF Generator and an RF Match are out of sync, reflective power occurs that damages the RF Generator.

Problem #2 – Harmful Radiation

Out of sync RF Generator and RF Match equipment can also result in dangerous radiation emissions that is harmful to humans.

Problem #3 – RF Noise

RF “noise” can also occur with mismatched RF Match and RF Generators, resulting in interference with other signals and electronic equipment.

What Happens If My RF Match Isn’t Working Correctly?

Several major problems can occur if your RF Match equipment isn’t properly used or maintained:

1. Permanent Damage – You could permanently damage your RF Generator because too much reflective power is coming back at it.

2. Product Waste – An out-of-tune and malfunctioning RF Match creates lower etching and ashing rates which will scrap your expensive production wafers.

3. RF Noise – You can have a wide range of noise problems on all your wiring. Noise will wreak havoc on your machine, giving you strange readings on vacuum pressures and other issues.

4. Skin Effect –  RF travels along the surface of conductors. This is called “The Skin Effect”.  If you are not matched properly, RF will radiate everywhere much like a microwave with its door open! This is incredibly harmful to human tissue, especially the eyes and other sensitive areas.

Extending the Life of Your RF Equipment

Properly maintaining and services your equipment on a regular schedule will greatly reduce the likelihood of your RF Match and RF Generator equipment malfunctioning.  We recommend services your equipment through a qualified professional.

SemiGroup’s experienced engineers & technicians are trained and certified in semiconductor OEM parts & systems refurbishment. All our parts and systems go through the same rigorous testing you would expect from an OEM.

Your health and safety and the safety of your equipment are our first priority! This is why SemiGroup rigorously tests all rebuilt and refurbished RF Generators and RF Matches before returning them to our customers.

We’re open and here for you! Call 1-888-SEMIGROUP or email parts@semigroup.com. Visit our website to browse RF generator replacement parts and refurbishment services.