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853-012175-004 Lam Research Harmonic Drive

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement. Applications Include: All Rainbow Standalone Platforms


  • New Belts

  • New Bearings

  • New Quad Seals

  • New O-rings

  • New Sensors

  • New Stepper Motors

  • New Connectors (Metal or Viking)

  • New Wiring

  • New Pins

  • Labeled

  • Fully Disassembled

  • All Parts Cleaned

  • Full Functionality Tested on an Actual Lam Rainbow Tool

  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement