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CMP Pad Conditioning Arm Service

0010-25303 | Applied Materials 300MM LK Pad Conditioner Arm
0010-12313 | Applied Materials 300MM HVM Reflexion Pad Conditioner Arm

Custom Cases

SG1000-2006 | 300MM Pad Conditioner Arm Custom Case

During production, CMP Pad Conditioning Arms endure an abrasive slurry that eats away at the surface. Constant use wears down sharp gears into nubs. By the time a CMP Pad Conditioning Arm is sent for refurbishment, the surface and components are an awful mess. 

SemiGroup repairs and refurbishes CMP Pad Conditioning Arms to OEM standards or better.

CMP Pad Conditioner Rebuild Process

Before and after service, each arm is inspected and tested on SemiGroup’s proprietary testing station. The first test finds everything that needs service like motors, harmonic drives, and worn components. Then our comprehensive rebuild replaces all of the basic components and consumable parts, including seals, bearings, and more. The original coating is removed and replaced with a durable new Teflon Powder Coating or a Standard Powder Coating.

SemiGroup’s proprietary CMP Pad Conditioning Arm testing station provides us the remarkable ability to fully test each refurbished conditioning arm in a production environment. Only invest your time and money in conditioning arm refurbishment that finishes with thorough testing.

SemiGroup’s engineers began at OEMs & wafer fabs before joining SemiGroup. We made the investment to support our experienced team with top-notch equipment for manufacturing, rebuilding, and testing critical semiconductor equipment components.

What's Included?

Refurbishment includes:

  • New Bearings
  • New O-rings
  • Fully disassembled
  • All Parts Cleaned
  • Harmonic Drive
  • Wave Generator
  • Flex Spline
  • Circular Spline (Disassemble and inspect, clean, regrease and reassemble).
  • All Fasteners Replaced
  • Test and check Servo Motors (Repair if needed)
  • Teflon Powder Coating or Standard
  • Powder Coating
  • Sensor Replacement
  • Boot Replacement

After all refurbishment processes are completed, all CMP Pad Conditioning Arms are production-tested for rotation torque, sweep torque, and downforce to ensure each refurbished arm is ready to go and performing perfectly. Each CMP Pad Conditioning Arm is cleaned top to bottom once more and prepared for shipping.

CMP Pad Conditioning Arms Refurbishment

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.

Trust SemiGroup for the parts and repairs you need today!

SemiGroup - The Leader in After-Market Semiconductor Equipment Support

SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!

Call 1-888-SEMIGROUP or email

Visit our online shop to request more information, browse parts, and start a new service request.